9/25/2010	10:25:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/25/2010	10:25:06 AM	Recipe started at 10:25 AM
9/25/2010	10:25:06 AM	Helium valve closed
9/25/2010	10:25:06 AM	H2 valve closed
9/25/2010	10:25:06 AM	BCl3 valve closed
9/25/2010	10:25:06 AM	PH3 valve closed
9/25/2010	10:25:06 AM	SiCl4 pre valve closed
9/25/2010	10:25:06 AM	SiCl4 post valve closed
9/25/2010	10:25:06 AM	Main Vac valve closed
9/25/2010	10:25:06 AM	Bypass valve closed
9/25/2010	10:25:06 AM	Bubbler valve closed
9/25/2010	10:25:06 AM	Helium MFC set to  0.000000
9/25/2010	10:25:06 AM	H2 MFC set to  0.000000
9/25/2010	10:25:06 AM	BCl3 MFC set to  0.000000
9/25/2010	10:25:06 AM	PHl3 MFC set to  0.000000
9/25/2010	10:25:06 AM	SiCl4 MFC set to  0.000000
9/25/2010	10:25:06 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	10:25:06 AM	Tube furnace set to 0
9/25/2010	10:25:06 AM	Run finished at 10:25 AM
9/25/2010	10:25:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/25/2010	10:25:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	10:25:20 AM	Recipe started at 10:25 AM
9/25/2010	10:25:20 AM	Helium valve closed
9/25/2010	10:25:20 AM	H2 valve closed
9/25/2010	10:25:20 AM	BCl3 valve closed
9/25/2010	10:25:20 AM	PH3 valve closed
9/25/2010	10:25:20 AM	SiCl4 pre valve closed
9/25/2010	10:25:20 AM	SiCl4 post valve closed
9/25/2010	10:25:20 AM	Main Vac valve closed
9/25/2010	10:25:20 AM	Bubbler valve closed
9/25/2010	10:25:20 AM	Bypass valve opened
9/25/2010	10:25:20 AM	Helium MFC set to  0.000000
9/25/2010	10:25:20 AM	H2 MFC set to  0.000000
9/25/2010	10:25:20 AM	BCl3 MFC set to  0.000000
9/25/2010	10:25:20 AM	PHl3 MFC set to  0.000000
9/25/2010	10:25:20 AM	SiCl4 MFC set to  0.000000
9/25/2010	10:25:20 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	10:25:20 AM	Tube furnace set to 0
9/25/2010	10:25:20 AM	Helium valve closed
9/25/2010	10:25:20 AM	H2 valve closed
9/25/2010	10:25:20 AM	BCl3 valve closed
9/25/2010	10:25:20 AM	PH3 valve closed
9/25/2010	10:25:20 AM	SiCl4 pre valve closed
9/25/2010	10:25:20 AM	SiCl4 post valve closed
9/25/2010	10:25:20 AM	Bubbler valve closed
9/25/2010	10:25:20 AM	Main Vac valve opened
9/25/2010	10:25:20 AM	Bypass valve opened
9/25/2010	10:25:20 AM	Helium MFC set to  0.000000
9/25/2010	10:25:20 AM	H2 MFC set to  0.000000
9/25/2010	10:25:20 AM	BCl3 MFC set to  0.000000
9/25/2010	10:25:20 AM	PHl3 MFC set to  0.000000
9/25/2010	10:25:20 AM	SiCl4 MFC set to  0.000000
9/25/2010	10:25:20 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	10:25:20 AM	Tube furnace set to 0
9/25/2010	10:25:20 AM	Run finished at 10:25 AM
9/25/2010	10:25:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	10:26:14 AM	Recipe started at 10:26 AM
9/25/2010	10:26:14 AM	Helium valve closed
9/25/2010	10:26:14 AM	BCl3 valve closed
9/25/2010	10:26:14 AM	PH3 valve closed
9/25/2010	10:26:14 AM	SiCl4 pre valve closed
9/25/2010	10:26:14 AM	SiCl4 post valve closed
9/25/2010	10:26:14 AM	Main Vac valve closed
9/25/2010	10:26:14 AM	Bypass valve closed
9/25/2010	10:26:14 AM	Bubbler valve closed
9/25/2010	10:26:14 AM	H2 valve opened
9/25/2010	10:26:14 AM	Helium MFC set to  0.000000
9/25/2010	10:26:14 AM	H2 MFC set to  500.000000
9/25/2010	10:26:14 AM	BCl3 MFC set to  0.000000
9/25/2010	10:26:14 AM	PHl3 MFC set to  0.000000
9/25/2010	10:26:14 AM	SiCl4 MFC set to  0.000000
9/25/2010	10:26:14 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	10:26:14 AM	Tube furnace set to 0
9/25/2010	10:27:38 AM	Helium valve closed
9/25/2010	10:27:38 AM	BCl3 valve closed
9/25/2010	10:27:38 AM	PH3 valve closed
9/25/2010	10:27:38 AM	SiCl4 pre valve closed
9/25/2010	10:27:38 AM	SiCl4 post valve closed
9/25/2010	10:27:38 AM	Main Vac valve closed
9/25/2010	10:27:38 AM	Bypass valve closed
9/25/2010	10:27:38 AM	H2 valve opened
9/25/2010	10:27:38 AM	Bubbler valve opened
9/25/2010	10:27:38 AM	Helium MFC set to  0.000000
9/25/2010	10:27:38 AM	H2 MFC set to  500.000000
9/25/2010	10:27:38 AM	BCl3 MFC set to  0.000000
9/25/2010	10:27:38 AM	PHl3 MFC set to  0.000000
9/25/2010	10:27:38 AM	SiCl4 MFC set to  0.000000
9/25/2010	10:27:38 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	10:27:38 AM	Tube furnace set to 1000
9/25/2010	10:47:38 AM	Helium valve closed
9/25/2010	10:47:38 AM	PH3 valve closed
9/25/2010	10:47:38 AM	Main Vac valve closed
9/25/2010	10:47:38 AM	Bypass valve closed
9/25/2010	10:47:38 AM	H2 valve opened
9/25/2010	10:47:38 AM	BCl3 valve opened
9/25/2010	10:47:38 AM	SiCl4 pre valve opened
9/25/2010	10:47:38 AM	SiCl4 post valve opened
9/25/2010	10:47:38 AM	Bubbler valve opened
9/25/2010	10:47:38 AM	Helium MFC set to  0.000000
9/25/2010	10:47:38 AM	H2 MFC set to  500.000000
9/25/2010	10:47:38 AM	BCl3 MFC set to  6.000000
9/25/2010	10:47:38 AM	PHl3 MFC set to  0.000000
9/25/2010	10:47:38 AM	SiCl4 MFC set to  50.000000
9/25/2010	10:47:38 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	10:47:38 AM	Tube furnace set to 1000
9/25/2010	11:02:38 AM	H2 valve closed
9/25/2010	11:02:38 AM	BCl3 valve closed
9/25/2010	11:02:38 AM	PH3 valve closed
9/25/2010	11:02:38 AM	SiCl4 pre valve closed
9/25/2010	11:02:38 AM	SiCl4 post valve closed
9/25/2010	11:02:38 AM	Main Vac valve closed
9/25/2010	11:02:38 AM	Bypass valve closed
9/25/2010	11:02:38 AM	Helium valve opened
9/25/2010	11:02:38 AM	Bubbler valve opened
9/25/2010	11:02:38 AM	Helium MFC set to  500.000000
9/25/2010	11:02:38 AM	H2 MFC set to  0.000000
9/25/2010	11:02:38 AM	BCl3 MFC set to  0.000000
9/25/2010	11:02:38 AM	PHl3 MFC set to  0.000000
9/25/2010	11:02:38 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:02:38 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	11:02:38 AM	Tube furnace set to 0
9/25/2010	11:22:38 AM	Helium valve closed
9/25/2010	11:22:38 AM	H2 valve closed
9/25/2010	11:22:38 AM	BCl3 valve closed
9/25/2010	11:22:38 AM	PH3 valve closed
9/25/2010	11:22:38 AM	SiCl4 pre valve closed
9/25/2010	11:22:38 AM	SiCl4 post valve closed
9/25/2010	11:22:38 AM	Main Vac valve closed
9/25/2010	11:22:38 AM	Bypass valve closed
9/25/2010	11:22:38 AM	Bubbler valve closed
9/25/2010	11:22:38 AM	Helium MFC set to  0.000000
9/25/2010	11:22:38 AM	H2 MFC set to  0.000000
9/25/2010	11:22:38 AM	BCl3 MFC set to  0.000000
9/25/2010	11:22:38 AM	PHl3 MFC set to  0.000000
9/25/2010	11:22:38 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:22:38 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	11:22:39 AM	Tube furnace set to 0
9/25/2010	11:22:39 AM	Run finished at 11:22 AM
9/25/2010	11:28:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2010	11:28:39 AM	Recipe started at 11:28 AM
9/25/2010	11:28:39 AM	H2 valve closed
9/25/2010	11:28:39 AM	BCl3 valve closed
9/25/2010	11:28:39 AM	PH3 valve closed
9/25/2010	11:28:39 AM	SiCl4 pre valve closed
9/25/2010	11:28:39 AM	SiCl4 post valve closed
9/25/2010	11:28:39 AM	Main Vac valve closed
9/25/2010	11:28:39 AM	Bypass valve closed
9/25/2010	11:28:39 AM	Bubbler valve closed
9/25/2010	11:28:39 AM	Helium valve opened
9/25/2010	11:28:39 AM	Helium MFC set to  500.000000
9/25/2010	11:28:39 AM	H2 MFC set to  0.000000
9/25/2010	11:28:39 AM	BCl3 MFC set to  0.000000
9/25/2010	11:28:39 AM	PHl3 MFC set to  0.000000
9/25/2010	11:28:39 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:28:39 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	11:28:40 AM	Tube furnace set to 0
9/25/2010	11:28:42 AM	Helium valve closed
9/25/2010	11:28:42 AM	H2 valve closed
9/25/2010	11:28:42 AM	BCl3 valve closed
9/25/2010	11:28:42 AM	PH3 valve closed
9/25/2010	11:28:42 AM	SiCl4 pre valve closed
9/25/2010	11:28:42 AM	SiCl4 post valve closed
9/25/2010	11:28:42 AM	Main Vac valve closed
9/25/2010	11:28:42 AM	Bypass valve closed
9/25/2010	11:28:42 AM	Bubbler valve closed
9/25/2010	11:28:42 AM	Helium MFC set to  0.000000
9/25/2010	11:28:42 AM	H2 MFC set to  0.000000
9/25/2010	11:28:42 AM	BCl3 MFC set to  0.000000
9/25/2010	11:28:42 AM	PHl3 MFC set to  0.000000
9/25/2010	11:28:42 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:28:42 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	11:28:43 AM	Tube furnace set to 0
9/25/2010	11:28:43 AM	Run finished at 11:28 AM
9/25/2010	11:28:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2010	11:48:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	11:48:02 AM	Recipe started at 11:48 AM
9/25/2010	11:48:02 AM	Helium valve closed
9/25/2010	11:48:02 AM	H2 valve closed
9/25/2010	11:48:02 AM	BCl3 valve closed
9/25/2010	11:48:02 AM	PH3 valve closed
9/25/2010	11:48:02 AM	SiCl4 pre valve closed
9/25/2010	11:48:02 AM	SiCl4 post valve closed
9/25/2010	11:48:02 AM	Main Vac valve closed
9/25/2010	11:48:02 AM	Bubbler valve closed
9/25/2010	11:48:02 AM	Bypass valve opened
9/25/2010	11:48:02 AM	Helium MFC set to  0.000000
9/25/2010	11:48:02 AM	H2 MFC set to  0.000000
9/25/2010	11:48:02 AM	BCl3 MFC set to  0.000000
9/25/2010	11:48:02 AM	PHl3 MFC set to  0.000000
9/25/2010	11:48:02 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:48:02 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	11:48:02 AM	Tube furnace set to 0
9/25/2010	11:49:29 AM	Run aborted at 11:49 AM
9/25/2010	11:49:29 AM	Helium valve closed
9/25/2010	11:49:29 AM	H2 valve closed
9/25/2010	11:49:29 AM	BCl3 valve closed
9/25/2010	11:49:29 AM	PH3 valve closed
9/25/2010	11:49:29 AM	SiCl4 pre valve closed
9/25/2010	11:49:29 AM	SiCl4 post valve closed
9/25/2010	11:49:29 AM	Bypass valve closed
9/25/2010	11:49:29 AM	Main Vac valve closed
9/25/2010	11:49:29 AM	Bubbler valve closed
9/25/2010	11:49:29 AM	Helium MFC set to  0.000000
9/25/2010	11:49:29 AM	H2 MFC set to  0.000000
9/25/2010	11:49:29 AM	BCl3 MFC set to  0.000000
9/25/2010	11:49:29 AM	PHl3 MFC set to  0.000000
9/25/2010	11:49:29 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:49:29 AM	Tube furnace set to 0
9/25/2010	11:49:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	11:52:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	11:52:17 AM	Recipe started at 11:52 AM
9/25/2010	11:52:17 AM	Helium valve closed
9/25/2010	11:52:17 AM	H2 valve closed
9/25/2010	11:52:17 AM	BCl3 valve closed
9/25/2010	11:52:17 AM	PH3 valve closed
9/25/2010	11:52:17 AM	SiCl4 pre valve closed
9/25/2010	11:52:17 AM	SiCl4 post valve closed
9/25/2010	11:52:17 AM	Main Vac valve closed
9/25/2010	11:52:17 AM	Bubbler valve closed
9/25/2010	11:52:17 AM	Bypass valve opened
9/25/2010	11:52:17 AM	Helium MFC set to  0.000000
9/25/2010	11:52:17 AM	H2 MFC set to  0.000000
9/25/2010	11:52:17 AM	BCl3 MFC set to  0.000000
9/25/2010	11:52:17 AM	PHl3 MFC set to  0.000000
9/25/2010	11:52:17 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:52:17 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	11:52:17 AM	Tube furnace set to 0
9/25/2010	11:52:30 AM	Run aborted at 11:52 AM
9/25/2010	11:52:30 AM	Helium valve closed
9/25/2010	11:52:30 AM	H2 valve closed
9/25/2010	11:52:30 AM	BCl3 valve closed
9/25/2010	11:52:30 AM	PH3 valve closed
9/25/2010	11:52:30 AM	SiCl4 pre valve closed
9/25/2010	11:52:30 AM	SiCl4 post valve closed
9/25/2010	11:52:30 AM	Bypass valve closed
9/25/2010	11:52:30 AM	Main Vac valve closed
9/25/2010	11:52:30 AM	Bubbler valve closed
9/25/2010	11:52:30 AM	Helium MFC set to  0.000000
9/25/2010	11:52:30 AM	H2 MFC set to  0.000000
9/25/2010	11:52:30 AM	BCl3 MFC set to  0.000000
9/25/2010	11:52:30 AM	PHl3 MFC set to  0.000000
9/25/2010	11:52:30 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:52:30 AM	Tube furnace set to 0
9/25/2010	11:52:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	11:57:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	11:57:26 AM	Recipe started at 11:57 AM
9/25/2010	11:57:26 AM	Helium valve closed
9/25/2010	11:57:26 AM	H2 valve closed
9/25/2010	11:57:26 AM	BCl3 valve closed
9/25/2010	11:57:26 AM	PH3 valve closed
9/25/2010	11:57:26 AM	SiCl4 pre valve closed
9/25/2010	11:57:26 AM	SiCl4 post valve closed
9/25/2010	11:57:26 AM	Main Vac valve closed
9/25/2010	11:57:26 AM	Bubbler valve closed
9/25/2010	11:57:26 AM	Bypass valve opened
9/25/2010	11:57:26 AM	Helium MFC set to  0.000000
9/25/2010	11:57:26 AM	H2 MFC set to  0.000000
9/25/2010	11:57:26 AM	BCl3 MFC set to  0.000000
9/25/2010	11:57:26 AM	PHl3 MFC set to  0.000000
9/25/2010	11:57:26 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:57:26 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	11:57:26 AM	Tube furnace set to 0
9/25/2010	11:58:15 AM	Helium valve closed
9/25/2010	11:58:15 AM	H2 valve closed
9/25/2010	11:58:15 AM	BCl3 valve closed
9/25/2010	11:58:15 AM	PH3 valve closed
9/25/2010	11:58:15 AM	SiCl4 pre valve closed
9/25/2010	11:58:15 AM	SiCl4 post valve closed
9/25/2010	11:58:15 AM	Bubbler valve closed
9/25/2010	11:58:15 AM	Main Vac valve opened
9/25/2010	11:58:15 AM	Bypass valve opened
9/25/2010	11:58:15 AM	Helium MFC set to  0.000000
9/25/2010	11:58:15 AM	H2 MFC set to  0.000000
9/25/2010	11:58:15 AM	BCl3 MFC set to  0.000000
9/25/2010	11:58:15 AM	PHl3 MFC set to  0.000000
9/25/2010	11:58:15 AM	SiCl4 MFC set to  0.000000
9/25/2010	11:58:15 AM	Bypass solenoid MFC set to  0.000000
9/25/2010	11:58:15 AM	Tube furnace set to 0
9/25/2010	11:58:15 AM	Run finished at 11:58 AM
9/25/2010	11:58:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	2:16:56 PM	Recipe started at 2:16 PM
9/25/2010	2:16:56 PM	Helium valve closed
9/25/2010	2:16:56 PM	BCl3 valve closed
9/25/2010	2:16:56 PM	PH3 valve closed
9/25/2010	2:16:56 PM	SiCl4 pre valve closed
9/25/2010	2:16:56 PM	SiCl4 post valve closed
9/25/2010	2:16:56 PM	Main Vac valve closed
9/25/2010	2:16:56 PM	Bypass valve closed
9/25/2010	2:16:56 PM	Bubbler valve closed
9/25/2010	2:16:56 PM	H2 valve opened
9/25/2010	2:16:56 PM	Helium MFC set to  0.000000
9/25/2010	2:16:56 PM	H2 MFC set to  500.000000
9/25/2010	2:16:56 PM	BCl3 MFC set to  0.000000
9/25/2010	2:16:56 PM	PHl3 MFC set to  0.000000
9/25/2010	2:16:56 PM	SiCl4 MFC set to  0.000000
9/25/2010	2:16:56 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	2:16:56 PM	Tube furnace set to 0
9/25/2010	2:18:17 PM	Helium valve closed
9/25/2010	2:18:17 PM	BCl3 valve closed
9/25/2010	2:18:17 PM	PH3 valve closed
9/25/2010	2:18:17 PM	SiCl4 pre valve closed
9/25/2010	2:18:17 PM	SiCl4 post valve closed
9/25/2010	2:18:17 PM	Main Vac valve closed
9/25/2010	2:18:17 PM	Bypass valve closed
9/25/2010	2:18:17 PM	H2 valve opened
9/25/2010	2:18:17 PM	Bubbler valve opened
9/25/2010	2:18:17 PM	Helium MFC set to  0.000000
9/25/2010	2:18:17 PM	H2 MFC set to  500.000000
9/25/2010	2:18:17 PM	BCl3 MFC set to  0.000000
9/25/2010	2:18:17 PM	PHl3 MFC set to  0.000000
9/25/2010	2:18:17 PM	SiCl4 MFC set to  0.000000
9/25/2010	2:18:17 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	2:18:17 PM	Tube furnace set to 1000
9/25/2010	2:38:17 PM	Helium valve closed
9/25/2010	2:38:17 PM	PH3 valve closed
9/25/2010	2:38:17 PM	Main Vac valve closed
9/25/2010	2:38:17 PM	Bypass valve closed
9/25/2010	2:38:17 PM	H2 valve opened
9/25/2010	2:38:17 PM	BCl3 valve opened
9/25/2010	2:38:17 PM	SiCl4 pre valve opened
9/25/2010	2:38:17 PM	SiCl4 post valve opened
9/25/2010	2:38:17 PM	Bubbler valve opened
9/25/2010	2:38:17 PM	Helium MFC set to  0.000000
9/25/2010	2:38:17 PM	H2 MFC set to  500.000000
9/25/2010	2:38:17 PM	BCl3 MFC set to  6.000000
9/25/2010	2:38:17 PM	PHl3 MFC set to  0.000000
9/25/2010	2:38:17 PM	SiCl4 MFC set to  50.000000
9/25/2010	2:38:17 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	2:38:17 PM	Tube furnace set to 1000
9/25/2010	2:53:17 PM	H2 valve closed
9/25/2010	2:53:17 PM	BCl3 valve closed
9/25/2010	2:53:17 PM	PH3 valve closed
9/25/2010	2:53:17 PM	SiCl4 pre valve closed
9/25/2010	2:53:17 PM	SiCl4 post valve closed
9/25/2010	2:53:17 PM	Main Vac valve closed
9/25/2010	2:53:17 PM	Bypass valve closed
9/25/2010	2:53:17 PM	Helium valve opened
9/25/2010	2:53:17 PM	Bubbler valve opened
9/25/2010	2:53:17 PM	Helium MFC set to  500.000000
9/25/2010	2:53:17 PM	H2 MFC set to  0.000000
9/25/2010	2:53:17 PM	BCl3 MFC set to  0.000000
9/25/2010	2:53:17 PM	PHl3 MFC set to  0.000000
9/25/2010	2:53:17 PM	SiCl4 MFC set to  0.000000
9/25/2010	2:53:17 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	2:53:17 PM	Tube furnace set to 0
9/25/2010	3:13:17 PM	Helium valve closed
9/25/2010	3:13:17 PM	H2 valve closed
9/25/2010	3:13:17 PM	BCl3 valve closed
9/25/2010	3:13:17 PM	PH3 valve closed
9/25/2010	3:13:17 PM	SiCl4 pre valve closed
9/25/2010	3:13:17 PM	SiCl4 post valve closed
9/25/2010	3:13:17 PM	Main Vac valve closed
9/25/2010	3:13:17 PM	Bypass valve closed
9/25/2010	3:13:17 PM	Bubbler valve closed
9/25/2010	3:13:17 PM	Helium MFC set to  0.000000
9/25/2010	3:13:17 PM	H2 MFC set to  0.000000
9/25/2010	3:13:17 PM	BCl3 MFC set to  0.000000
9/25/2010	3:13:17 PM	PHl3 MFC set to  0.000000
9/25/2010	3:13:17 PM	SiCl4 MFC set to  0.000000
9/25/2010	3:13:17 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	3:13:18 PM	Tube furnace set to 0
9/25/2010	3:13:18 PM	Run finished at 3:13 PM
9/25/2010	4:18:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2010	4:18:52 PM	Recipe started at 4:18 PM
9/25/2010	4:18:52 PM	H2 valve closed
9/25/2010	4:18:52 PM	BCl3 valve closed
9/25/2010	4:18:52 PM	PH3 valve closed
9/25/2010	4:18:52 PM	SiCl4 pre valve closed
9/25/2010	4:18:52 PM	SiCl4 post valve closed
9/25/2010	4:18:52 PM	Main Vac valve closed
9/25/2010	4:18:52 PM	Bypass valve closed
9/25/2010	4:18:52 PM	Bubbler valve closed
9/25/2010	4:18:52 PM	Helium valve opened
9/25/2010	4:18:52 PM	Helium MFC set to  500.000000
9/25/2010	4:18:52 PM	H2 MFC set to  0.000000
9/25/2010	4:18:52 PM	BCl3 MFC set to  0.000000
9/25/2010	4:18:52 PM	PHl3 MFC set to  0.000000
9/25/2010	4:18:52 PM	SiCl4 MFC set to  0.000000
9/25/2010	4:18:52 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	4:18:53 PM	Tube furnace set to 0
9/25/2010	4:18:57 PM	Helium valve closed
9/25/2010	4:18:57 PM	H2 valve closed
9/25/2010	4:18:57 PM	BCl3 valve closed
9/25/2010	4:18:57 PM	PH3 valve closed
9/25/2010	4:18:57 PM	SiCl4 pre valve closed
9/25/2010	4:18:57 PM	SiCl4 post valve closed
9/25/2010	4:18:57 PM	Main Vac valve closed
9/25/2010	4:18:57 PM	Bypass valve closed
9/25/2010	4:18:57 PM	Bubbler valve closed
9/25/2010	4:18:57 PM	Helium MFC set to  0.000000
9/25/2010	4:18:57 PM	H2 MFC set to  0.000000
9/25/2010	4:18:57 PM	BCl3 MFC set to  0.000000
9/25/2010	4:18:57 PM	PHl3 MFC set to  0.000000
9/25/2010	4:18:57 PM	SiCl4 MFC set to  0.000000
9/25/2010	4:18:57 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	4:18:57 PM	Tube furnace set to 0
9/25/2010	4:18:57 PM	Run finished at 4:18 PM
9/25/2010	4:18:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/25/2010	4:28:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	4:28:36 PM	Recipe started at 4:28 PM
9/25/2010	4:28:36 PM	Helium valve closed
9/25/2010	4:28:36 PM	H2 valve closed
9/25/2010	4:28:36 PM	BCl3 valve closed
9/25/2010	4:28:36 PM	PH3 valve closed
9/25/2010	4:28:36 PM	SiCl4 pre valve closed
9/25/2010	4:28:36 PM	SiCl4 post valve closed
9/25/2010	4:28:36 PM	Main Vac valve closed
9/25/2010	4:28:36 PM	Bubbler valve closed
9/25/2010	4:28:36 PM	Bypass valve opened
9/25/2010	4:28:36 PM	Helium MFC set to  0.000000
9/25/2010	4:28:36 PM	H2 MFC set to  0.000000
9/25/2010	4:28:36 PM	BCl3 MFC set to  0.000000
9/25/2010	4:28:36 PM	PHl3 MFC set to  0.000000
9/25/2010	4:28:36 PM	SiCl4 MFC set to  0.000000
9/25/2010	4:28:36 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	4:28:36 PM	Tube furnace set to 0
9/25/2010	4:29:18 PM	Helium valve closed
9/25/2010	4:29:18 PM	H2 valve closed
9/25/2010	4:29:18 PM	BCl3 valve closed
9/25/2010	4:29:18 PM	PH3 valve closed
9/25/2010	4:29:18 PM	SiCl4 pre valve closed
9/25/2010	4:29:18 PM	SiCl4 post valve closed
9/25/2010	4:29:18 PM	Bubbler valve closed
9/25/2010	4:29:18 PM	Main Vac valve opened
9/25/2010	4:29:18 PM	Bypass valve opened
9/25/2010	4:29:18 PM	Helium MFC set to  0.000000
9/25/2010	4:29:18 PM	H2 MFC set to  0.000000
9/25/2010	4:29:18 PM	BCl3 MFC set to  0.000000
9/25/2010	4:29:18 PM	PHl3 MFC set to  0.000000
9/25/2010	4:29:18 PM	SiCl4 MFC set to  0.000000
9/25/2010	4:29:18 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	4:29:18 PM	Tube furnace set to 0
9/25/2010	4:29:19 PM	Run finished at 4:29 PM
9/25/2010	4:29:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	5:43:12 PM	Recipe started at 5:43 PM
9/25/2010	5:43:12 PM	Helium valve closed
9/25/2010	5:43:12 PM	H2 valve closed
9/25/2010	5:43:12 PM	BCl3 valve closed
9/25/2010	5:43:12 PM	PH3 valve closed
9/25/2010	5:43:12 PM	SiCl4 pre valve closed
9/25/2010	5:43:12 PM	SiCl4 post valve closed
9/25/2010	5:43:12 PM	Main Vac valve closed
9/25/2010	5:43:12 PM	Bubbler valve closed
9/25/2010	5:43:12 PM	Bypass valve opened
9/25/2010	5:43:12 PM	Helium MFC set to  0.000000
9/25/2010	5:43:12 PM	H2 MFC set to  0.000000
9/25/2010	5:43:12 PM	BCl3 MFC set to  0.000000
9/25/2010	5:43:12 PM	PHl3 MFC set to  0.000000
9/25/2010	5:43:12 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:43:12 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:43:12 PM	Tube furnace set to 0
9/25/2010	5:43:12 PM	Helium valve closed
9/25/2010	5:43:12 PM	H2 valve closed
9/25/2010	5:43:12 PM	BCl3 valve closed
9/25/2010	5:43:12 PM	PH3 valve closed
9/25/2010	5:43:12 PM	SiCl4 pre valve closed
9/25/2010	5:43:12 PM	SiCl4 post valve closed
9/25/2010	5:43:12 PM	Bubbler valve closed
9/25/2010	5:43:12 PM	Main Vac valve opened
9/25/2010	5:43:12 PM	Bypass valve opened
9/25/2010	5:43:12 PM	Helium MFC set to  0.000000
9/25/2010	5:43:12 PM	H2 MFC set to  0.000000
9/25/2010	5:43:12 PM	BCl3 MFC set to  0.000000
9/25/2010	5:43:12 PM	PHl3 MFC set to  0.000000
9/25/2010	5:43:12 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:43:12 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:43:12 PM	Tube furnace set to 0
9/25/2010	5:43:17 PM	H2 valve closed
9/25/2010	5:43:17 PM	BCl3 valve closed
9/25/2010	5:43:17 PM	PH3 valve closed
9/25/2010	5:43:17 PM	SiCl4 pre valve closed
9/25/2010	5:43:17 PM	SiCl4 post valve closed
9/25/2010	5:43:17 PM	Bubbler valve closed
9/25/2010	5:43:17 PM	Helium valve opened
9/25/2010	5:43:17 PM	Main Vac valve opened
9/25/2010	5:43:17 PM	Bypass valve opened
9/25/2010	5:43:17 PM	Helium MFC set to  100.000000
9/25/2010	5:43:17 PM	H2 MFC set to  0.000000
9/25/2010	5:43:17 PM	BCl3 MFC set to  0.000000
9/25/2010	5:43:17 PM	PHl3 MFC set to  0.000000
9/25/2010	5:43:17 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:43:17 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:43:17 PM	Tube furnace set to 0
9/25/2010	5:43:17 PM	Helium valve closed
9/25/2010	5:43:17 PM	H2 valve closed
9/25/2010	5:43:17 PM	BCl3 valve closed
9/25/2010	5:43:17 PM	PH3 valve closed
9/25/2010	5:43:17 PM	SiCl4 pre valve closed
9/25/2010	5:43:17 PM	SiCl4 post valve closed
9/25/2010	5:43:17 PM	Bubbler valve closed
9/25/2010	5:43:17 PM	Main Vac valve opened
9/25/2010	5:43:17 PM	Bypass valve opened
9/25/2010	5:43:17 PM	Helium MFC set to  0.000000
9/25/2010	5:43:17 PM	H2 MFC set to  0.000000
9/25/2010	5:43:17 PM	BCl3 MFC set to  0.000000
9/25/2010	5:43:17 PM	PHl3 MFC set to  0.000000
9/25/2010	5:43:17 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:43:17 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:43:17 PM	Tube furnace set to 0
9/25/2010	5:43:19 PM	H2 valve closed
9/25/2010	5:43:19 PM	BCl3 valve closed
9/25/2010	5:43:19 PM	PH3 valve closed
9/25/2010	5:43:19 PM	SiCl4 pre valve closed
9/25/2010	5:43:19 PM	SiCl4 post valve closed
9/25/2010	5:43:19 PM	Bubbler valve closed
9/25/2010	5:43:19 PM	Helium valve opened
9/25/2010	5:43:19 PM	Main Vac valve opened
9/25/2010	5:43:19 PM	Bypass valve opened
9/25/2010	5:43:19 PM	Helium MFC set to  100.000000
9/25/2010	5:43:19 PM	H2 MFC set to  0.000000
9/25/2010	5:43:19 PM	BCl3 MFC set to  0.000000
9/25/2010	5:43:19 PM	PHl3 MFC set to  0.000000
9/25/2010	5:43:19 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:43:19 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:43:19 PM	Tube furnace set to 0
9/25/2010	5:43:31 PM	Helium valve closed
9/25/2010	5:43:31 PM	H2 valve closed
9/25/2010	5:43:31 PM	BCl3 valve closed
9/25/2010	5:43:31 PM	PH3 valve closed
9/25/2010	5:43:31 PM	SiCl4 pre valve closed
9/25/2010	5:43:31 PM	SiCl4 post valve closed
9/25/2010	5:43:31 PM	Bubbler valve closed
9/25/2010	5:43:31 PM	Main Vac valve opened
9/25/2010	5:43:31 PM	Bypass valve opened
9/25/2010	5:43:31 PM	Helium MFC set to  0.000000
9/25/2010	5:43:31 PM	H2 MFC set to  0.000000
9/25/2010	5:43:31 PM	BCl3 MFC set to  0.000000
9/25/2010	5:43:31 PM	PHl3 MFC set to  0.000000
9/25/2010	5:43:31 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:43:31 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:43:31 PM	Tube furnace set to 0
9/25/2010	5:43:32 PM	H2 valve closed
9/25/2010	5:43:32 PM	BCl3 valve closed
9/25/2010	5:43:32 PM	PH3 valve closed
9/25/2010	5:43:32 PM	SiCl4 pre valve closed
9/25/2010	5:43:32 PM	SiCl4 post valve closed
9/25/2010	5:43:32 PM	Bubbler valve closed
9/25/2010	5:43:32 PM	Helium valve opened
9/25/2010	5:43:32 PM	Main Vac valve opened
9/25/2010	5:43:32 PM	Bypass valve opened
9/25/2010	5:43:32 PM	Helium MFC set to  100.000000
9/25/2010	5:43:32 PM	H2 MFC set to  0.000000
9/25/2010	5:43:32 PM	BCl3 MFC set to  0.000000
9/25/2010	5:43:32 PM	PHl3 MFC set to  0.000000
9/25/2010	5:43:32 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:43:32 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:43:32 PM	Tube furnace set to 0
9/25/2010	5:52:32 PM	Helium valve closed
9/25/2010	5:52:32 PM	H2 valve closed
9/25/2010	5:52:32 PM	BCl3 valve closed
9/25/2010	5:52:32 PM	PH3 valve closed
9/25/2010	5:52:32 PM	SiCl4 pre valve closed
9/25/2010	5:52:32 PM	SiCl4 post valve closed
9/25/2010	5:52:32 PM	Bubbler valve closed
9/25/2010	5:52:32 PM	Main Vac valve opened
9/25/2010	5:52:32 PM	Bypass valve opened
9/25/2010	5:52:32 PM	Helium MFC set to  0.000000
9/25/2010	5:52:32 PM	H2 MFC set to  0.000000
9/25/2010	5:52:32 PM	BCl3 MFC set to  0.000000
9/25/2010	5:52:32 PM	PHl3 MFC set to  0.000000
9/25/2010	5:52:32 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:52:32 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:52:32 PM	Tube furnace set to 0
9/25/2010	5:53:32 PM	H2 valve closed
9/25/2010	5:53:32 PM	BCl3 valve closed
9/25/2010	5:53:32 PM	PH3 valve closed
9/25/2010	5:53:32 PM	SiCl4 pre valve closed
9/25/2010	5:53:32 PM	SiCl4 post valve closed
9/25/2010	5:53:32 PM	Bubbler valve closed
9/25/2010	5:53:32 PM	Helium valve opened
9/25/2010	5:53:32 PM	Main Vac valve opened
9/25/2010	5:53:32 PM	Bypass valve opened
9/25/2010	5:53:32 PM	Helium MFC set to  100.000000
9/25/2010	5:53:32 PM	H2 MFC set to  0.000000
9/25/2010	5:53:32 PM	BCl3 MFC set to  0.000000
9/25/2010	5:53:32 PM	PHl3 MFC set to  0.000000
9/25/2010	5:53:32 PM	SiCl4 MFC set to  0.000000
9/25/2010	5:53:32 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	5:53:32 PM	Tube furnace set to 0
9/25/2010	6:02:32 PM	Helium valve closed
9/25/2010	6:02:32 PM	H2 valve closed
9/25/2010	6:02:32 PM	BCl3 valve closed
9/25/2010	6:02:32 PM	PH3 valve closed
9/25/2010	6:02:32 PM	SiCl4 pre valve closed
9/25/2010	6:02:32 PM	SiCl4 post valve closed
9/25/2010	6:02:32 PM	Bubbler valve closed
9/25/2010	6:02:32 PM	Main Vac valve opened
9/25/2010	6:02:32 PM	Bypass valve opened
9/25/2010	6:02:32 PM	Helium MFC set to  0.000000
9/25/2010	6:02:32 PM	H2 MFC set to  0.000000
9/25/2010	6:02:32 PM	BCl3 MFC set to  0.000000
9/25/2010	6:02:32 PM	PHl3 MFC set to  0.000000
9/25/2010	6:02:32 PM	SiCl4 MFC set to  0.000000
9/25/2010	6:02:32 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	6:02:32 PM	Tube furnace set to 0
9/25/2010	6:03:32 PM	H2 valve closed
9/25/2010	6:03:32 PM	BCl3 valve closed
9/25/2010	6:03:32 PM	PH3 valve closed
9/25/2010	6:03:32 PM	SiCl4 pre valve closed
9/25/2010	6:03:32 PM	SiCl4 post valve closed
9/25/2010	6:03:32 PM	Bubbler valve closed
9/25/2010	6:03:32 PM	Helium valve opened
9/25/2010	6:03:32 PM	Main Vac valve opened
9/25/2010	6:03:32 PM	Bypass valve opened
9/25/2010	6:03:32 PM	Helium MFC set to  100.000000
9/25/2010	6:03:32 PM	H2 MFC set to  0.000000
9/25/2010	6:03:32 PM	BCl3 MFC set to  0.000000
9/25/2010	6:03:32 PM	PHl3 MFC set to  0.000000
9/25/2010	6:03:32 PM	SiCl4 MFC set to  0.000000
9/25/2010	6:03:32 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	6:03:32 PM	Tube furnace set to 0
9/25/2010	6:04:19 PM	Helium valve closed
9/25/2010	6:04:19 PM	H2 valve closed
9/25/2010	6:04:19 PM	BCl3 valve closed
9/25/2010	6:04:19 PM	PH3 valve closed
9/25/2010	6:04:19 PM	SiCl4 pre valve closed
9/25/2010	6:04:19 PM	SiCl4 post valve closed
9/25/2010	6:04:19 PM	Bubbler valve closed
9/25/2010	6:04:19 PM	Main Vac valve opened
9/25/2010	6:04:19 PM	Bypass valve opened
9/25/2010	6:04:19 PM	Helium MFC set to  0.000000
9/25/2010	6:04:19 PM	H2 MFC set to  0.000000
9/25/2010	6:04:19 PM	BCl3 MFC set to  0.000000
9/25/2010	6:04:19 PM	PHl3 MFC set to  0.000000
9/25/2010	6:04:19 PM	SiCl4 MFC set to  0.000000
9/25/2010	6:04:19 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	6:04:19 PM	Tube furnace set to 0
9/25/2010	6:04:20 PM	Run finished at 6:04 PM
9/25/2010	6:05:26 PM	Recipe started at 6:05 PM
9/25/2010	6:05:26 PM	Helium valve closed
9/25/2010	6:05:26 PM	BCl3 valve closed
9/25/2010	6:05:26 PM	PH3 valve closed
9/25/2010	6:05:26 PM	SiCl4 pre valve closed
9/25/2010	6:05:26 PM	SiCl4 post valve closed
9/25/2010	6:05:26 PM	Main Vac valve closed
9/25/2010	6:05:26 PM	Bypass valve closed
9/25/2010	6:05:26 PM	Bubbler valve closed
9/25/2010	6:05:26 PM	H2 valve opened
9/25/2010	6:05:26 PM	Helium MFC set to  0.000000
9/25/2010	6:05:26 PM	H2 MFC set to  500.000000
9/25/2010	6:05:26 PM	BCl3 MFC set to  0.000000
9/25/2010	6:05:26 PM	PHl3 MFC set to  0.000000
9/25/2010	6:05:26 PM	SiCl4 MFC set to  0.000000
9/25/2010	6:05:26 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	6:05:26 PM	Tube furnace set to 0
9/25/2010	6:06:47 PM	Helium valve closed
9/25/2010	6:06:47 PM	BCl3 valve closed
9/25/2010	6:06:47 PM	PH3 valve closed
9/25/2010	6:06:47 PM	SiCl4 pre valve closed
9/25/2010	6:06:47 PM	SiCl4 post valve closed
9/25/2010	6:06:47 PM	Main Vac valve closed
9/25/2010	6:06:47 PM	Bypass valve closed
9/25/2010	6:06:47 PM	H2 valve opened
9/25/2010	6:06:47 PM	Bubbler valve opened
9/25/2010	6:06:47 PM	Helium MFC set to  0.000000
9/25/2010	6:06:47 PM	H2 MFC set to  500.000000
9/25/2010	6:06:47 PM	BCl3 MFC set to  0.000000
9/25/2010	6:06:47 PM	PHl3 MFC set to  0.000000
9/25/2010	6:06:47 PM	SiCl4 MFC set to  0.000000
9/25/2010	6:06:47 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	6:06:47 PM	Tube furnace set to 1000
9/25/2010	6:26:47 PM	Helium valve closed
9/25/2010	6:26:47 PM	PH3 valve closed
9/25/2010	6:26:47 PM	Main Vac valve closed
9/25/2010	6:26:47 PM	Bypass valve closed
9/25/2010	6:26:47 PM	H2 valve opened
9/25/2010	6:26:47 PM	BCl3 valve opened
9/25/2010	6:26:47 PM	SiCl4 pre valve opened
9/25/2010	6:26:47 PM	SiCl4 post valve opened
9/25/2010	6:26:47 PM	Bubbler valve opened
9/25/2010	6:26:47 PM	Helium MFC set to  0.000000
9/25/2010	6:26:47 PM	H2 MFC set to  500.000000
9/25/2010	6:26:47 PM	BCl3 MFC set to  5.000000
9/25/2010	6:26:47 PM	PHl3 MFC set to  0.000000
9/25/2010	6:26:47 PM	SiCl4 MFC set to  50.000000
9/25/2010	6:26:47 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	6:26:47 PM	Tube furnace set to 1000
9/25/2010	6:41:47 PM	H2 valve closed
9/25/2010	6:41:47 PM	BCl3 valve closed
9/25/2010	6:41:47 PM	PH3 valve closed
9/25/2010	6:41:47 PM	SiCl4 pre valve closed
9/25/2010	6:41:47 PM	SiCl4 post valve closed
9/25/2010	6:41:47 PM	Main Vac valve closed
9/25/2010	6:41:47 PM	Bypass valve closed
9/25/2010	6:41:47 PM	Helium valve opened
9/25/2010	6:41:47 PM	Bubbler valve opened
9/25/2010	6:41:47 PM	Helium MFC set to  500.000000
9/25/2010	6:41:47 PM	H2 MFC set to  0.000000
9/25/2010	6:41:47 PM	BCl3 MFC set to  0.000000
9/25/2010	6:41:47 PM	PHl3 MFC set to  0.000000
9/25/2010	6:41:47 PM	SiCl4 MFC set to  0.000000
9/25/2010	6:41:47 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	6:41:47 PM	Tube furnace set to 0
9/25/2010	7:01:47 PM	Helium valve closed
9/25/2010	7:01:47 PM	H2 valve closed
9/25/2010	7:01:47 PM	BCl3 valve closed
9/25/2010	7:01:47 PM	PH3 valve closed
9/25/2010	7:01:47 PM	SiCl4 pre valve closed
9/25/2010	7:01:47 PM	SiCl4 post valve closed
9/25/2010	7:01:47 PM	Main Vac valve closed
9/25/2010	7:01:47 PM	Bypass valve closed
9/25/2010	7:01:47 PM	Bubbler valve closed
9/25/2010	7:01:47 PM	Helium MFC set to  0.000000
9/25/2010	7:01:47 PM	H2 MFC set to  0.000000
9/25/2010	7:01:47 PM	BCl3 MFC set to  0.000000
9/25/2010	7:01:47 PM	PHl3 MFC set to  0.000000
9/25/2010	7:01:47 PM	SiCl4 MFC set to  0.000000
9/25/2010	7:01:47 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	7:01:47 PM	Tube furnace set to 0
9/25/2010	7:01:48 PM	Run finished at 7:01 PM
9/25/2010	7:13:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/25/2010	7:13:51 PM	Recipe started at 7:13 PM
9/25/2010	7:13:51 PM	Helium valve closed
9/25/2010	7:13:51 PM	H2 valve closed
9/25/2010	7:13:51 PM	BCl3 valve closed
9/25/2010	7:13:51 PM	PH3 valve closed
9/25/2010	7:13:51 PM	SiCl4 pre valve closed
9/25/2010	7:13:51 PM	SiCl4 post valve closed
9/25/2010	7:13:51 PM	Main Vac valve closed
9/25/2010	7:13:51 PM	Bubbler valve closed
9/25/2010	7:13:51 PM	Bypass valve opened
9/25/2010	7:13:51 PM	Helium MFC set to  0.000000
9/25/2010	7:13:51 PM	H2 MFC set to  0.000000
9/25/2010	7:13:51 PM	BCl3 MFC set to  0.000000
9/25/2010	7:13:51 PM	PHl3 MFC set to  0.000000
9/25/2010	7:13:51 PM	SiCl4 MFC set to  0.000000
9/25/2010	7:13:51 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	7:13:51 PM	Tube furnace set to 0
9/25/2010	7:14:33 PM	Helium valve closed
9/25/2010	7:14:33 PM	H2 valve closed
9/25/2010	7:14:33 PM	BCl3 valve closed
9/25/2010	7:14:33 PM	PH3 valve closed
9/25/2010	7:14:33 PM	SiCl4 pre valve closed
9/25/2010	7:14:33 PM	SiCl4 post valve closed
9/25/2010	7:14:33 PM	Bubbler valve closed
9/25/2010	7:14:33 PM	Main Vac valve opened
9/25/2010	7:14:33 PM	Bypass valve opened
9/25/2010	7:14:33 PM	Helium MFC set to  0.000000
9/25/2010	7:14:33 PM	H2 MFC set to  0.000000
9/25/2010	7:14:33 PM	BCl3 MFC set to  0.000000
9/25/2010	7:14:33 PM	PHl3 MFC set to  0.000000
9/25/2010	7:14:33 PM	SiCl4 MFC set to  0.000000
9/25/2010	7:14:33 PM	Bypass solenoid MFC set to  0.000000
9/25/2010	7:14:33 PM	Tube furnace set to 0
9/25/2010	7:14:33 PM	Run finished at 7:14 PM
9/25/2010	7:14:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
